Hot plate 4 Hot plate 3 Hot plate 2 Hot plate 1 晶圓框架.晶圓載具 2 Wafer Ring&Caseette 1 Rack 3 Rack 2 Rack 1 Magazine 4 Magazine 3 Magazine 2 Magazine 1 Heat sink3 Heat sink2 Heat sink1 Dummy6 銅片5 Dummy4 Dummy3 Dummy2 Dummy1 Cnc machining5 Cnc machining4 Cnc machining3 Cnc machining2 Cnc machining
